TEGAL CORP /DE/


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Current Reports
8-K
2024-11-08
 
8-K
2024-09-20
EX-10.1

Beneficial Ownership Report
13D/A
2024-09-23

Recent Insider activity

Subsidiaries
EX-21
2023-04-17
EX-21
2022-04-15
EX-21
2019-10-18
EX-21
2018-04-24
EX-21
2017-04-10
EX-21.1
2015-06-26
EX-21.1
2014-06-06
EX-21.1
2013-06-27
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